דטקטור לבעיות חריגות במפות סיכות פלטה: חיבור של דטקטור פצ'-בייסד עם דטקטור גנרטיבי דיפוזי

תקציר מקורי באנגליתarXiv:2610.09993v1 Announce Type: new Abstract: Spatial defect signatures on wafer bin maps (WBMs) trace yield loss to specific process faults, yet supervised classifiers recognize only the defect types seen during training, and one-class detectors built on a single mechanism tend to capture either local structural deviations or global distributional violations, but rarely both. This work proposes a hybrid one-class framework that couples a patch-based student-teacher detector (EfficientAD) with a denoising diffusion probabilistic model (DDPM) used for partial-diffusion reconstruction, and fuses their percentile-calibrated scores through a fixed convex combination. Trained on only 700 normal wafers from the WM-38K mixed-type dataset and evaluated on 18,658 held-out wafers, the fused detect